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Small Plasma Cleaner (Simple Sheet-Type Plasma Cleaner)

Small Plasma Cleaner (Simple Sheet-Type Plasma Cleaner)

This device is a simple sheet-type plasma cleaner using parallel plate high-frequency plasma. It is a compact process device measuring 600mm (W) × 600mm (D) × 750mm (H) (excluding the pump).

  • Etching Equipment
  • Ashing device

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